MDP
Mask Data Preparation

From Specs to Masks…

Advanced manufacturing, packaging, and inspection technologies – 3D-IC, Stitching, MPWs, PCMs, Multi-Patterning, density management… – create disruptions, bottlenecks, and inefficiencies in existing Mask Data Preparation flows, highlighting the need for innovative solutions automating processes from specs to masks.

XYALIS transforms Mask Data Preparation with end-to-end automation and reduces engineering time by up to 40-70% while improving quality and cutting silicon usage by 10-15%.

“XYALIS customizable solution addressed bottlenecks and inefficiencies in our existing MDP flow with their specialized engines and domain expertise”.

XYALIS tightly integrated Mask Data Preparation suite automates the repetitive and time-consuming tasks between design and manufacturing: multi-chip assembly, frame generation, mask set layout, wafer map and step plan optimization, wafer level dummy fill, mask manufacturability verification, automatic documentation and SEMI-P10 mask order form generation for error-free hand-off to mask shops, manufacturing and inspection teams. They automate the repetitive and time consuming tasks between design and fracturing:

• Multi-Chip Assembly and Automation: Generation of Multi Project Wafers (MPW) or shuttles with GOTmuch. It’s an automated placement tool dedicated to maximizing silicon usage and minimizing saw lines when assembling heterogeneous chips,

• Automatic Scribe-line and Reticle Automation: Generation of complex reticles with GOTframe. It’s an automated tool for inserting manufacturing items between chips and inside scribe lines, according to reusable process rules,

• Masks and Fields editing with Step Plan and Wafermap optimization: Intuitive mask set creation with GOTmask, supporting Multi-Layer Reticles (MLR), optimized 1X flow, and wafer map optimization.

• Mask Manufacturability Verification: Correct by construction generated field and mask assemblies meet customer specs, while an input layout integrity checker verifies all inputs. Special checks are carried out to ensure that the final mask set database can be handled with no problem by any mask shop, manufacturing, and inspections tool.

• Automatic Documentation and SEMI-P10 Mask OrderForm generation: User documentation, generated by the click of a button, is fully customizable for use by mask shops, manufacturing, and inspection teams. A SEMI-P10 mask order form ensures seamless hand-off to the mask shop and warrants interoperability between mask suppliers.

• Customizable with python API and SQL support: XYALIS MDP solution is fully scriptable, with Tcl/Tk or Python API, and includes a built-in SQL connector to any DB, for easy inclusion in any existing customer flow.

• GOT engine: Handles the largest designs with maximum performance and minimum memory requirements thanks to the GDS & OASIS (GOT) data representation engine, tailored to leverage native OASIS.MASK optimizations.

Built around a powerful dedicated graphical editor and a shared data format, XYALIS MDP solution handles standard layout and job deck formats: GDSII, OASIS ^®, MEBES. Each module can be run through the common graphical user interface or on the command line for automatic processing and easy inclusion in an existing flow.